Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding

Hongwen Xuan; Zhigang Zhao; Hironori Igarashi; Shinji Ito; Kouji Kakizaki; Yohei Kobayashi

doi:10.1117/12.2038318

12 March 2014 Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding

Hongwen Xuan, Zhigang Zhao, Hironori Igarashi, Shinji Ito, Kouji Kakizaki, Yohei Kobayashi

Author Affiliations +

Proceedings Volume 8961, Fiber Lasers XI: Technology, Systems, and Applications; 89612M (2014) https://doi.org/10.1117/12.2038318
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

We propose and report a 193 nm narrow-linewidth light generation by a frequency mixing of Yb and Er-fiber lasers as the seed for an ArF excimer laser. The Yb-fiber laser includes a pulsed distributed feedback (DFB) or external cavity diode laser (ECDL), acousto-optic modulator(AOM), fiber amplifiers and an Yb:YAG single crystal fiber (SCF) power amplifier with more than 7 W output. The Er-fiber laser consists of a continuous-wave (CW) DFB laser, a semiconductor optical amplifier (SOA), and fiber amplifiers. The second harmonic generation (SHG) and the fourth harmonic generation (FHG) of Yb laser at 515 nm and 258 nm reach 5 W and 1.5 W, respectively. Two stages of sum-frequency generation (SFG) produce the power of 100 mW for 193 nm laser by use of CLBO crystals.

Citation Download Citation

Hongwen Xuan, Zhigang Zhao, Hironori Igarashi, Shinji Ito, Kouji Kakizaki, and Yohei Kobayashi "Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding", Proc. SPIE 8961, Fiber Lasers XI: Technology, Systems, and Applications, 89612M (12 March 2014); https://doi.org/10.1117/12.2038318

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