12 March 2014 Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding
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Abstract
We propose and report a 193 nm narrow-linewidth light generation by a frequency mixing of Yb and Er-fiber lasers as the seed for an ArF excimer laser. The Yb-fiber laser includes a pulsed distributed feedback (DFB) or external cavity diode laser (ECDL), acousto-optic modulator(AOM), fiber amplifiers and an Yb:YAG single crystal fiber (SCF) power amplifier with more than 7 W output. The Er-fiber laser consists of a continuous-wave (CW) DFB laser, a semiconductor optical amplifier (SOA), and fiber amplifiers. The second harmonic generation (SHG) and the fourth harmonic generation (FHG) of Yb laser at 515 nm and 258 nm reach 5 W and 1.5 W, respectively. Two stages of sum-frequency generation (SFG) produce the power of 100 mW for 193 nm laser by use of CLBO crystals.
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Hongwen Xuan, Hongwen Xuan, Zhigang Zhao, Zhigang Zhao, Hironori Igarashi, Hironori Igarashi, Shinji Ito, Shinji Ito, Kouji Kakizaki, Kouji Kakizaki, Yohei Kobayashi, Yohei Kobayashi, } "Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding", Proc. SPIE 8961, Fiber Lasers XI: Technology, Systems, and Applications, 89612M (12 March 2014); doi: 10.1117/12.2038318; https://doi.org/10.1117/12.2038318
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