20 February 2014 CW emission at 193 nm using an all solid-state laser source
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Abstract
We report on the realization of a narrow-band continuous-wave laser source in the deep-ultraviolet. Via two consecutive second-harmonic processes starting from a near-infrared diode laser system, we demonstrate an output power of more than 15 mW at 193 nm. The setup is capable of mode hop-free frequency tuning over a range of 100 GHz und coarse tuning over more than 5 nm. We see direct applications of this laser source in the fields of semiconductor metrology and high-resolution spectroscopy in the deep-ultraviolet.
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Matthias Scholz, Dmitrijs Opalevs, Jürgen Stuhler, Patrick Leisching, Wilhelm Kaenders, Guiling Wang, Xiaoyang Wang, Rukang Li, Chuangtian Chen, "CW emission at 193 nm using an all solid-state laser source", Proc. SPIE 8964, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIII, 896402 (20 February 2014); doi: 10.1117/12.2037191; https://doi.org/10.1117/12.2037191
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