High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner

B. Jaeggi; B. Neuenschwander; M. Zimmermann; L. Penning; R. deLoor; K. Weingarten; A. Oehler

doi:10.1117/12.2037379

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6 March 2014 High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner

B. Jaeggi; B. Neuenschwander; M. Zimmermann; L. Penning; R. deLoor; K. Weingarten; A. Oehler

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Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 89670Q (2014) https://doi.org/10.1117/12.2037379
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

To be competitive in laser micro machining, high throughput is an important aspect. One possibility to increase productivity is scaling up the ablation process i.e. linearly increasing the laser repetition rate together with the average power and the scan speed. In the MHz-regime high scan speeds are required which cannot be provided by commercially available galvo scanners. In this work we will report on the results by using a polygon line scanner having a maximum scan speed of 100 m/s and a 50 W ps-laser system, synchronized via the SuperSync™ technology. We will show the results concerning the removal rate and the surface quality for working at the optimum point i.e. most efficient point at repetition rates up to 8.2 MHz.

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B. Jaeggi, B. Neuenschwander, M. Zimmermann, L. Penning, R. deLoor, K. Weingarten, and A. Oehler "High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670Q (6 March 2014); https://doi.org/10.1117/12.2037379

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