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6 March 2014 Influence of laser parameters on quality of microholes and process efficiency
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To enable the direct-spinning process of super-micro fibres (< 0.5 dtex) suitable for novel medical, hygienical and technical products microhole arrays with diameters down to 25 μm in very high quality are required. Using ultrashort pulses together with a helical drilling optics microholes with high accuracy were manufactured in metals of a thickness in the range of 0.3 mm. However, the required process time for a single microhole ranges up to several ten seconds. Simple energy balance considerations show that higher averaged powers - either achieved with larger pulse energies or an increased repetition rate - considerable reduce the process time. In this case plasma formation and heat accumulation show an increased formation of melt and recast. Thus, the objective is to increase the productivity while maintaining consistent quality of the microholes. With this aim, the influence of pulse energy and repetition rate on the borehole geometry, processing quality and process efficiency was investigated for helical drilling. In the present research work a TruMicro 5250 laser source (tp = 8 ps, λ=515 nm, fR=800 kHz) was used. To determine the process time of the microhole the transmitted laser radiation was recorded. A systematic evaluation of the process quality and process time dependent on pulse energy and repetition rate will be presented in this contribution. First laser manufactured spinning nozzles with microhole diameters down to 25 μm processed in 0.24 mm thick AuPt alloy were used to fabricate unique super-micro fibres with yarn counts down to 0.2 dtex.
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A. Feuer, C. Kunz, M. Kraus, V. Onuseit, R. Weber, T. Graf, D. Ingildeev, and F. Hermanutz "Influence of laser parameters on quality of microholes and process efficiency", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670H (6 March 2014);

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