Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape

Alain Cournoyer; David Gay; Pascal Turbis; Emmanuel Lorin; Martin Briand; Yves Taillon

doi:10.1117/12.2040343

6 March 2014 Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape

Alain Cournoyer, David Gay, Pascal Turbis, Emmanuel Lorin, Martin Briand, Yves Taillon

Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 89670O (2014) https://doi.org/10.1117/12.2040343
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

The commercial availability of fiber lasers based on MOPA architectures with arbitrary temporal pulse shaping capabilities offers completely new possibilities for laser material processing. In this study, based on numerical modeling results in the nanosecond regime for the case of silicon at 1064 nm wavelength, we show that not only the single pulse laser ablation efficiency depends on the temporal pulse shape but, we also demonstrate how a stochastic approach can be applied in order to reach an optimized pulse shape maximizing the material vaporization rate for given laser pulse energy and duration. Experimental results are compared to the numerical modeling results, and the discrepancies are discussed in terms of the role played by plasma shielding effects and melt ejection at high intensity.

Citation Download Citation

Alain Cournoyer, David Gay, Pascal Turbis, Emmanuel Lorin, Martin Briand, and Yves Taillon "Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670O (6 March 2014); https://doi.org/10.1117/12.2040343

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