6 March 2014 Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape
Author Affiliations +
Abstract
The commercial availability of fiber lasers based on MOPA architectures with arbitrary temporal pulse shaping capabilities offers completely new possibilities for laser material processing. In this study, based on numerical modeling results in the nanosecond regime for the case of silicon at 1064 nm wavelength, we show that not only the single pulse laser ablation efficiency depends on the temporal pulse shape but, we also demonstrate how a stochastic approach can be applied in order to reach an optimized pulse shape maximizing the material vaporization rate for given laser pulse energy and duration. Experimental results are compared to the numerical modeling results, and the discrepancies are discussed in terms of the role played by plasma shielding effects and melt ejection at high intensity.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alain Cournoyer, Alain Cournoyer, David Gay, David Gay, Pascal Turbis, Pascal Turbis, Emmanuel Lorin, Emmanuel Lorin, Martin Briand, Martin Briand, Yves Taillon, Yves Taillon, } "Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670O (6 March 2014); doi: 10.1117/12.2040343; https://doi.org/10.1117/12.2040343
PROCEEDINGS
12 PAGES


SHARE
Back to Top