6 March 2014 Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach
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Abstract
An increase of industrial needs for micro-ablation and surface structuration using sub-picosecond laser working at high repetition rate is required. In this context, new industrial lasers were recently commercialized for such a type of purpose. The potential of a new industrial femtosecond laser source (Tangerine model from Amplitude Système) is investigated in this work for different etching purposes. Our experimental results will be also compared to those obtained when using Ti:Sa laser source, with the help of numerical simulations.
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Julien Zelgowski, Julien Zelgowski, Frédéric Mermet, Frédéric Mermet, Frédéric Antoni, Frédéric Antoni, Cyril Mauclair, Cyril Mauclair, Eric Fogarassy, Eric Fogarassy, Eric Mottay, Eric Mottay, } "Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670U (6 March 2014); doi: 10.1117/12.2037736; https://doi.org/10.1117/12.2037736
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