6 March 2014 Laser-printed/structured thick-film electrodes for Li-ion microbatteries
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Laser induced forward transfer (LIFT) process was used to print thick-film electrodes (LiCoO2 cathode and carbon anode) and solid-state polymer membranes for Li-ion microbatteries. Their electrochemical behaviors were characterized by cyclic voltammograms, capacity measurement and cycling performance. Microbatteries based on these laser-printed thick-film electrodes showed significantly higher discharge capacities than those made by sputter-deposited thin film techniques. This enhanced performance is attributed to the high surface area porous structure of the laser-printed electrodes that allows improved diffusion of the Li-ions across the 100 μm-thick electrodes without a significant internal resistance. In addition, a laser structuring process was used to prepare three-dimensional microstructures on the laserprinted thick-film electrodes to further improve battery performance by increasing the active surface area. These results indicate that the laser processing techniques are a viable approach for developing Li-ion microbatteries in microelectronic devices. This paper will show examples of Li-ion microbatteries fabricated with various polymer separators and structured electrodes using a combination of LIFT and excimer laser structuring processes.
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Heungsoo Kim, Heungsoo Kim, Thomas E. Sutto, Thomas E. Sutto, Johannes Proell, Johannes Proell, Robert Kohler, Robert Kohler, Wilhelm Pfleging, Wilhelm Pfleging, Alberto Piqué, Alberto Piqué, "Laser-printed/structured thick-film electrodes for Li-ion microbatteries", Proc. SPIE 8968, Laser-based Micro- and Nanoprocessing VIII, 89680L (6 March 2014); doi: 10.1117/12.2037287; https://doi.org/10.1117/12.2037287

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