12 July 1988 Near-Field Scanning Optical Microscopy (NSOM)
Author Affiliations +
Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944521
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Superresolution optical images have been generated with near-field scanning optical microscopy (NSOM). The underlying concept is presented and several modes of operation are discussed. A resolution based on edge sharpness of 70 nm or better has been demonstrated with two different instruments. Images have been obtained which characterize the resolution as a function of two critical parameters: the aperture size and the aperture-sample separation. The near-field images also illustrate novel features resulting from several forms of contrast. Finally, the potential of NSOM is compared with conventional lens-based forms of microscopy as well as with more recent scanned tip methods.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E Betzig, E Betzig, M Isaacson, M Isaacson, H Barshatzky, H Barshatzky, A Lewis, A Lewis, K Lin, K Lin, "Near-Field Scanning Optical Microscopy (NSOM)", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944521; https://doi.org/10.1117/12.944521

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