Scanning Capacitance Microscopy

J R Matey

doi:10.1117/12.944526

12 July 1988 Scanning Capacitance Microscopy

J R Matey

Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944526
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Scanning capacitance microscopy is a mechanically scanned microscopy which uses variations in the capacitance between the sample and a scanning tip as a probe of sample topography. In this paper we discuss the theory of the capacitance probe and its application to scanning capacitance microscopy and fringe field profilometry .

Citation Download Citation

J R Matey "Scanning Capacitance Microscopy", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944526

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