6 March 2014 Three-dimensional ceramic molding process based on microstereolithography for the production of piezoelectric energy harvesters
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Proceedings Volume 8970, Laser 3D Manufacturing; 89700H (2014) https://doi.org/10.1117/12.2041822
Event: SPIE LASE, 2014, San Francisco, California, United States
A three-dimensional (3-D) molding process using a master polymer mold produced by microstereolithography has been developed for the production of piezoelectric ceramic elements. In this method, ceramic slurry is injected into a 3-D polymer mold via a centrifugal casting process. The polymer master mold is thermally decomposed so that complex 3-D piezoelectric ceramic elements can be produced. As an example of 3-D piezoelectric ceramic elements, we produced a spiral piezoelectric element that can convert multidirectional loads into a voltage. It was confirmed that a prototype of the spiral piezoelectric element could generate a voltage by applying a load in both parallel and lateral directions in relation to the helical axis. The power output of 123 pW was obtained by applying the maximum load of 2.8N at 2 Hz along the helical axis. In addition, to improve the performance of power generation, we utilized a two-step sintering process to obtain dense piezoelectric elements. As a result, we obtained a sintering body with relative density of 92.8%. Piezoelectric constant d31 of the sintered body attained to -40.0 pC/N. Furthermore we analyzed the open-circuit voltage of the spiral piezoelectric element using COMSOL multiphysics. As a result, it was found that use of patterned electrodes according to the surface potential distribution of the spiral piezoelectric element had a potential to provide high output voltage that was 20 times larger than that of uniform electrodes.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shoji Maruo, Shoji Maruo, Kenji Sugiyama, Kenji Sugiyama, Yuya Daicho, Yuya Daicho, Kensaku Monri, Kensaku Monri, "Three-dimensional ceramic molding process based on microstereolithography for the production of piezoelectric energy harvesters", Proc. SPIE 8970, Laser 3D Manufacturing, 89700H (6 March 2014); doi: 10.1117/12.2041822; https://doi.org/10.1117/12.2041822

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