6 March 2014 Gas-mediated charged particle beam processing of nanostructured materials
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Proceedings Volume 8970, Laser 3D Manufacturing; 89700O (2014) https://doi.org/10.1117/12.2042021
Event: SPIE LASE, 2014, San Francisco, California, United States
Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals, optoelectronic grade semiconductors and oxides. Here we highlight three recent developments of particular interest to the optical materials and nanofabrication communities: fabrication of self-supporting, three dimensional, fluorescent diamond nanostructures, electron beam induced deposition (EBID) of high purity materials via activated chemisorption, and post-growth purification of nanocrystalline EBID-grown platinum suitable for catalysis applications.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. J. Lobo, C. J. Lobo, A. A. Martin, A. A. Martin, C. Elbadawi, C. Elbadawi, J. Bishop, J. Bishop, I. Aharonovich, I. Aharonovich, M. Toth, M. Toth, "Gas-mediated charged particle beam processing of nanostructured materials", Proc. SPIE 8970, Laser 3D Manufacturing, 89700O (6 March 2014); doi: 10.1117/12.2042021; https://doi.org/10.1117/12.2042021


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