7 March 2014 Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography
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Abstract
A table top nanofabrication system which combines the classic Talbot imaging effect and a compact table top soft-x ray laser is described in this paper. Periodic nanostructures on millimeter square are fabricated using this robust, simple and defect tolerant fabrication method. Talbot lithography allows for a complete coherent extreme ultraviolet lithography process in a compact table top system. Double exposure allowed for the reduction of the feature sizes.
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W. Li, W. Li, D. Patel, D. Patel, C. S. Menoni, C. S. Menoni, A. Stein, A. Stein, W. Chao, W. Chao, E. Anderson, E. Anderson, M. C. Marconi, M. C. Marconi, } "Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730D (7 March 2014); doi: 10.1117/12.2041688; https://doi.org/10.1117/12.2041688
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