7 March 2014 Planar chalcogenide glass mid-infrared photonics
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Chalcogenide glasses, namely the amorphous compounds containing sulfur, selenium, and/or tellurium, have emerged as a promising material candidate for mid-infrared integrated photonics given their wide optical transparency window, high linear and nonlinear indices, as well as their capacity for monolithic integration on a wide array of substrates. Exploiting these unique features of the material, we demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon with a high intrinsic quality factor of 2 × 105 at 5.2 micron wavelength, and what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared.
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Hongtao Lin, Lan Li, Yi Zou, Fei Deng, Chaoying Ni, Sylvain Danto, J. David Musgraves, Kathleen Richardson, Stephen T. Kozacik, Maciej Murakowski, Dennis Prather, Juejun Hu, "Planar chalcogenide glass mid-infrared photonics", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 89740D (7 March 2014); doi: 10.1117/12.2035688; https://doi.org/10.1117/12.2035688

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