Optomechanical cantilever device for displacement sensing and variable attenuator

Peter A. Cooper; Lewis G. Carpenter; Paolo L. Mennea; Christopher Holmes; James C. Gates; Peter G. R. Smith

doi:10.1117/12.2039806

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7 March 2014 Optomechanical cantilever device for displacement sensing and variable attenuator

Peter A. Cooper, Lewis G. Carpenter, Paolo L. Mennea, Christopher Holmes, James C. Gates, Peter G. R. Smith

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Proceedings Volume 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII; 897413 (2014) https://doi.org/10.1117/12.2039806
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.

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Peter A. Cooper, Lewis G. Carpenter, Paolo L. Mennea, Christopher Holmes, James C. Gates, and Peter G. R. Smith "Optomechanical cantilever device for displacement sensing and variable attenuator", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 897413 (7 March 2014); https://doi.org/10.1117/12.2039806

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