7 March 2014 Manufacturing technique of large-area optical elements with micro/nano structures on both surfaces
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Abstract
Melt transcription molding is one of novel processes suitable for manufacturing large-area thin film with microstructures. We designed the mold which enables to transfer structures on both surfaces for the melt transcription molding machine and examined about relations of temperature and pressure on the accuracy of dimension and optical strain. To keep the high accuracy of relative position between both surfaces, the mold can avoid strain caused by the thermal expansion of metal and is optimized by three-dimension unsteady heat conduction analysis. As a result, distribution of pressure mainly affects stress and distribution density, influences shrinkage and accuracy of position. The decenter between both surfaces was several micrometers. This makes it possible to mass-produce the large-area optical elements which is formed the micro and nano structures on both surfaces with extremely low birefringence at high productivity.
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Toshimitsu Takaoka, Toshimitsu Takaoka, Hidetoshi Fukui, Hidetoshi Fukui, Tomoya Yamashita, Tomoya Yamashita, Takeshi Matsuo, Takeshi Matsuo, Kazuya Yamamoto, Kazuya Yamamoto, Hiroshi Owari, Hiroshi Owari, Hiroshi Ito, Hiroshi Ito, } "Manufacturing technique of large-area optical elements with micro/nano structures on both surfaces", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 897418 (7 March 2014); doi: 10.1117/12.2038745; https://doi.org/10.1117/12.2038745
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