7 March 2014 Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching
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Abstract
A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.
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Lei Yuan, Xinwei Lan, Jie Huang, Hanzheng Wang, Baokai Cheng, Jie Liu, Hai Xiao, "Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 89741A (7 March 2014); doi: 10.1117/12.2038824; https://doi.org/10.1117/12.2038824
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