7 March 2014 Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions
Author Affiliations +
Abstract
This work reports on irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20000 under vacuum. The susceptibility of the devices to radiation induced degradation was investigated using 60Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. The results support the efforts towards design and fabrication of highly reliable MEMS devices for space applications.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Bandi, J. Baborowski, A. Dommann, H. Shea, F. Cardot, A. Neels, "Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions", Proc. SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, 89750I (7 March 2014); doi: 10.1117/12.2044209; https://doi.org/10.1117/12.2044209
PROCEEDINGS
9 PAGES


SHARE
Back to Top