7 March 2014 Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions
Author Affiliations +
This work reports on irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20000 under vacuum. The susceptibility of the devices to radiation induced degradation was investigated using 60Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. The results support the efforts towards design and fabrication of highly reliable MEMS devices for space applications.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Bandi, T. Bandi, J. Baborowski, J. Baborowski, A. Dommann, A. Dommann, H. Shea, H. Shea, F. Cardot, F. Cardot, A. Neels, A. Neels, "Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions", Proc. SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, 89750I (7 March 2014); doi: 10.1117/12.2044209; https://doi.org/10.1117/12.2044209


Making MEMS more suited for Space assessing the proton...
Proceedings of SPIE (March 08 2013)
Simulation of heavy charged particles damage on MEMS
Proceedings of SPIE (December 29 2016)
EMCCDs for space applications
Proceedings of SPIE (June 14 2006)
Effects of radiation on MEMS
Proceedings of SPIE (February 17 2011)

Back to Top