PROCEEDINGS VOLUME 8977
SPIE MOEMS-MEMS | 1-6 FEBRUARY 2014
MOEMS and Miniaturized Systems XIII
Proceedings Volume 8977 is from: Logo
SPIE MOEMS-MEMS
1-6 February 2014
San Francisco, California, United States
Front Matter: Volume 8977
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897701 (27 March 2014); doi: 10.1117/12.2063251
Microscanner
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897705 (8 March 2014); doi: 10.1117/12.2042671
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897706 (7 March 2014); doi: 10.1117/12.2036565
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897707 (7 March 2014); doi: 10.1117/12.2038606
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897708 (7 March 2014); doi: 10.1117/12.2039950
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897709 (7 March 2014); doi: 10.1117/12.2042195
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770A (7 March 2014); doi: 10.1117/12.2038249
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770B (7 March 2014); doi: 10.1117/12.2041067
MOEMS for Imaging Applications
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770C (7 March 2014); doi: 10.1117/12.2039054
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770D (7 March 2014); doi: 10.1117/12.2035244
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770E (7 March 2014); doi: 10.1117/12.2038588
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770F (7 March 2014); doi: 10.1117/12.2042679
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770G (7 March 2014); doi: 10.1117/12.2037915
MOEMS Components and Systems
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770H (7 March 2014); doi: 10.1117/12.2044197
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770I (7 March 2014); doi: 10.1117/12.2036406
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770J (7 March 2014); doi: 10.1117/12.2038671
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770K (7 March 2014); doi: 10.1117/12.2039455
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770L (7 March 2014); doi: 10.1117/12.2039511
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770M (7 March 2014); doi: 10.1117/12.2040728
Spatial Light Modulator
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770N (7 March 2014); doi: 10.1117/12.2037621
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770O (7 March 2014); doi: 10.1117/12.2036533
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770P (7 March 2014); doi: 10.1117/12.2040331
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770Q (7 March 2014); doi: 10.1117/12.2041692
Microspectrometer and Optical Filters
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770R (7 March 2014); doi: 10.1117/12.2038641
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770S (7 March 2014); doi: 10.1117/12.2037218
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770T (7 March 2014); doi: 10.1117/12.2038235
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U (7 March 2014); doi: 10.1117/12.2036272
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770V (7 March 2014); doi: 10.1117/12.2040767
MOEMS for Sensing Applications
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770W (7 March 2014); doi: 10.1117/12.2044314
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770X (7 March 2014); doi: 10.1117/12.2035732
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770Y (7 March 2014); doi: 10.1117/12.2037295
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770Z (7 March 2014); doi: 10.1117/12.2040022
Poster Session
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897710 (7 March 2014); doi: 10.1117/12.2039961
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897711 (7 March 2014); doi: 10.1117/12.2040294
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897712 (7 March 2014); doi: 10.1117/12.2035484
Additional Manuscript
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897717 (8 March 2014); doi: 10.1117/12.2064898
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