8 March 2014 Micro-scanning mirrors for high-power laser applications in laser surgery
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We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser-surgical instrument for neurosurgery to cut skull tissue. An electrostatic driven 2D-raster scanning mirror with 5x7.1mm aperture is used for dynamic steering of a ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micro mirror with 6 mm x 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W average laser power.
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Thilo Sandner, Thilo Sandner, Simon Kimme, Simon Kimme, Thomas Grasshoff, Thomas Grasshoff, Ulrich Todt, Ulrich Todt, Alexander Graf, Alexander Graf, Cristian Tulea, Cristian Tulea, Achim Lenenbach, Achim Lenenbach, Harald Schenk, Harald Schenk, "Micro-scanning mirrors for high-power laser applications in laser surgery", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897705 (8 March 2014); doi: 10.1117/12.2042671; https://doi.org/10.1117/12.2042671

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