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7 March 2014High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors
MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic
actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel
actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is
dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A
3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic
actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both
electrostatic and pneumatic actuation is approximately 100μs.
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Mohammad J. Moghimi, Krishna N. Chattergoon, David L. Dickensheets, "High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors," Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897709 (7 March 2014); https://doi.org/10.1117/12.2042195