Paper
7 March 2014 Next generation miniature simultaneous multi-hyperspectral imaging systems
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Abstract
The concept for a hyperspectral imaging system using a Fabry-Perot tunable filter (FPTF) array that is fabricated using “miniature optical electrical mechanical system” (MOEMS) technology. [1] Using an array of FPTF as an approach to hyperspectral imaging relaxes wavelength tuning requirements considerably because of the reduced portion of the spectrum that is covered by each element in the array. In this paper, Pacific Advanced Technology and ARL present the results of a concept design and performed analysis of a MOEMS based tunable Fabry-Perot array (FPTF) to perform simultaneous multispectral and hyperspectral imaging with relatively high spatial resolution. The concept design was developed with support of an Army SBIR Phase I program The Fabry-Perot tunable MOEMS filter array was combined with a miniature optics array and a focal plane array of 1024 x 1024 pixels to produce 16 colors every frame of the camera. Each color image has a spatial resolution of 256 x 256 pixels with an IFOV of 1.7 mrads and FOV of 25 degrees. The spectral images are collected simultaneously allowing high resolution spectral-spatial-temporal information in each frame of the camera, thus enabling the implementation of spectral-temporal-spatial algorithms in real-time to provide high sensitivity for the detection of weak signals in a high clutter background environment with low sensitivity to camera motion. The challenge in the design was the independent actuation of each Fabry Perot element in the array allowing for individual tuning. An additional challenge was the need to maximize the fill factor to improve the spatial coverage with minimal dead space. This paper will only address the concept design and analysis of the Fabry-Perot tunable filter array. A previous paper presented at SPIE DSS in 2012 explained the design of the optical array.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michele Hinnrichs and Neelam Gupta "Next generation miniature simultaneous multi-hyperspectral imaging systems", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770D (7 March 2014); https://doi.org/10.1117/12.2035244
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KEYWORDS
Mirrors

Fabry–Perot interferometers

Gold

Tunable filters

Microopto electromechanical systems

Hyperspectral imaging

Spectral resolution

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