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7 March 2014 A bi-material microbeam based thermal actuator for out-of-plane rotation
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Abstract
A new design for bi-material microbeams is presented in this paper which enables the tuning of their thermal actuation response to deliver out-of-plane rotation . The design is applied to a group of 300 μm long and 20 μm wide gold-over-polysilicon microbeams with a 60 μm long top gold strip positioned in different locations along the beam length. Numerical simulation predicts that if the gold strip is situated 20 μm from one end of the microbeam, a maximum out-of- plane rotation angle of 0.9 degree can be achieved with a temperature increase of 150 °C. Thermal loading experiments carried out on fabricated similar microbeams show similar responses to those predicted by finite element simulations.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ali Najafi Sohi and Patricia M. Nieva "A bi-material microbeam based thermal actuator for out-of-plane rotation", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770M (7 March 2014); https://doi.org/10.1117/12.2040728
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