Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization

Frédéric Zamkotsian; Michael Canonica; Patrick Lanzoni; Wilfried Noell; Sebastien Lani

doi:10.1117/12.2041692

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7 March 2014 Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization

Frédéric Zamkotsian, Michael Canonica, Patrick Lanzoni, Wilfried Noell, Sebastien Lani

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Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770Q (2014) https://doi.org/10.1117/12.2041692
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a European development of micromirror arrays (MMA) for generating reflective slit masks in future MOS, called MIRA. MMA with 100 × 200 μm² single-crystal silicon micromirrors were successfully designed, fabricated and tested. Arrays are composed of 2048 micromirrors (32 x 64) with a peak-to-valley deformation less than 10 nm, a tilt angle of 24° for an actuation voltage of 130 V. The micromirrors were actuated successfully before, during and after cryogenic cooling, down to 162K. The micromirror surface deformation was measured at cryo and is below 30 nm peak-to-valley. These performances demonstrate the ability of such MOEMS device to work as objects selector in future generation of MOS instruments both in ground-based and space telescopes. In order to fill large focal planes (mosaicing of several chips), we are currently developing large micromirror arrays integrated with their electronics.

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Frédéric Zamkotsian, Michael Canonica, Patrick Lanzoni, Wilfried Noell, and Sebastien Lani "Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770Q (7 March 2014); https://doi.org/10.1117/12.2041692

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