MEMS infrared approaches to detector based on nonlinear oscillation and wavelength selective emitter using surface plasmon polariton

Minoru Sasaki; Shinya Kumagai

doi:10.1117/12.2044314

7 March 2014 MEMS infrared approaches to detector based on nonlinear oscillation and wavelength selective emitter using surface plasmon polariton

Minoru Sasaki, Shinya Kumagai

Author Affiliations +

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770W (2014) https://doi.org/10.1117/12.2044314
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

The suspended MEMS structure is suitable for reducing the energy loss due to the thermal conduction. There is the possibility that IR photon energy can be well-controlled to generate some physical effects. A new method bases on the nonlinear oscillation for the detector. The thin film torsional spring exhibits a large hard spring effect when the deflection occurs in the out-of-plane direction of the film. When IR is absorbed, the resonator bends due to the thermal expansion. The torsional spring becomes harder increasing the resonant frequency. The frequency measurement is suited for the precise sensing. The device response is measured using the laser (wavelength of 650nm). The resonant frequency is 88-94kHz. Q factor is about 1600 in vacuum (1Pa). The sensitivity is -0.144[kHz/(kW/m²)]. As for the emitter, nondispersive IR gas sensor is considered. The molecules have their intrinsic absorptions. CO₂ absorbs the wavelength 4.2- 4.3μm. The major incandescent light bulbs have the broad spectrum emitting IR which is not used for gas sensing. The wavelength selectivity at the gas bandwidth will improve the efficiency. A new principle uses the microheater placed facing to the grating. SPP is excited carrying IR energy on the grating surface. IR emission is the reverse process of excitation occurring at the output end. The emission spectra show SPP related peak having the width of 190nm. When the input power increases from 0.3 to 1.9W, the peak at wavelength of 3.5μm becomes clearer.

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Minoru Sasaki and Shinya Kumagai "MEMS infrared approaches to detector based on nonlinear oscillation and wavelength selective emitter using surface plasmon polariton", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770W (7 March 2014); https://doi.org/10.1117/12.2044314

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KEYWORDS

Sensors

Resonators

Infrared sensors

Thermography

Infrared detectors

Microelectromechanical systems

Silicon

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