7 March 2014 Mechanically amplified MEMS optical accelerometer with FPI readout
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Abstract
We have developed a silicon MEMS optical accelerometer in which the motion of the proof mass is mechanically amplified using a V-beam mechanism prior to transduction. The output motion of the V-beam is detected using a Fabry-Pérot interferometer (FPI) which is interrogated in reflection mode via a single-mode optical fibre. Mechanical amplification allows the sensitivity of the accelerometer to be increased without compromising the resonant frequency or measurement bandwidth. We have also devised an all-optical method for calibrating the return signal from the FPI, based on photothermal actuation of the V-beam structure using fibre-delivered light of a different wavelength. A finite-element model has been used to predict the relationship between the incident optical power and the cavity length at steady state, as well as the step response which determines the minimum time for calibration. Prototype devices have been fabricated with resonant frequencies above 10 kHz and approximately linear response for accelerations in the range 0.01 to 15 g.
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Edward Davies, Edward Davies, David S. George, David S. George, Andrew S. Holmes, Andrew S. Holmes, } "Mechanically amplified MEMS optical accelerometer with FPI readout", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770Z (7 March 2014); doi: 10.1117/12.2040022; https://doi.org/10.1117/12.2040022
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