7 March 2014 Micro-mirror arrays for spectroscopic applications
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Abstract
Visible and Near Infrared (NIR) spectroscopy finds use in a number of applications including security, biomedicine, military, materials science, and materials processing areas to name a few. Visible red and NIR ranges are particularly valuable for in vivo studies because photons in this range have very low potential energy and are hence usually considered noninvasive. Integrated spectrometers operating in the NIR spectral range can have high resolution and transmission, low cost, and can exhibit low noise depending on detection properties and light throughput. Optical and NIR spectrometers in this and other work have been shown to operate under normal environmental conditions (such as temperature, atmospheric gases, and humidity) and do not generally require vacuum operation. In this research, the “spectral analysis” sections of a micro-mirror based Reflective Adaptive Slit (RAS) with single InGaAs photodiode spectrometer has been studied and compared to a conventional InGaAs array detector based spectrometer. It should be noted that in both approach, either RAS with single photodiode or Conventional Array Detector (CAD) based spectrometry, the spectrometer system requires a dispersive element (prism or grating) or filter to separate the polychromatic light beam under analysis. If the system is a so called “active” system, a light source is also needed. In this work we test, model, and compare a Reflective Adaptive Slit micro-mirror based single element photodiode system to a commercial array detector based spectrometer. Within the context of the Reflective single photodiode micro-mirror Slit spectrometer, we are establishing a set of optical requirements to ideally cover a number of applications. In addition to experimental performance comparisons between the spectrometer approaches, we will report on the performance requirements and environmental issues for these NIR spectrometers.
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W. M. Duncan, C. J. Maxwell, "Micro-mirror arrays for spectroscopic applications", Proc. SPIE 8979, Emerging Digital Micromirror Device Based Systems and Applications VI, 89790E (7 March 2014); doi: 10.1117/12.2043134; https://doi.org/10.1117/12.2043134
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