Si-based nanoplasmonic resonant devices for all-optical integrated circuits

M. P. Nielsen; A. Y. Elezzabi

doi:10.1117/12.2036775

7 March 2014 Si-based nanoplasmonic resonant devices for all-optical integrated circuits

M. P. Nielsen, A. Y. Elezzabi

Proceedings Volume 8984, Ultrafast Phenomena and Nanophotonics XVIII; 89840I (2014) https://doi.org/10.1117/12.2036775
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

Presented here are nanoplasmonic Au/SiO₂/Si metal-insulator-semiconductor waveguides and resonators capable of broadband operation and with the potential for monolithic integration with complementary metal-oxide-semiconductor technology. Bragg reflector resonators, Bragg mirrors, and disk resonators are designed, fabricated, and experimentally characterized. With a compact device footprint as small as 1.5μm2 and quality factors as high as 64.4 at λ=1.545μm, the Bragg reflector resonators have one of the highest quality factor over device footprint figure of merit yet demonstrated for a silicon nanoplasmonic device.

Citation Download Citation

M. P. Nielsen and A. Y. Elezzabi "Si-based nanoplasmonic resonant devices for all-optical integrated circuits", Proc. SPIE 8984, Ultrafast Phenomena and Nanophotonics XVIII, 89840I (7 March 2014); https://doi.org/10.1117/12.2036775

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