7 March 2014 Si-based nanoplasmonic resonant devices for all-optical integrated circuits
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Abstract
Presented here are nanoplasmonic Au/SiO2/Si metal-insulator-semiconductor waveguides and resonators capable of broadband operation and with the potential for monolithic integration with complementary metal-oxide-semiconductor technology. Bragg reflector resonators, Bragg mirrors, and disk resonators are designed, fabricated, and experimentally characterized. With a compact device footprint as small as 1.5μm2 and quality factors as high as 64.4 at λ=1.545μm, the Bragg reflector resonators have one of the highest quality factor over device footprint figure of merit yet demonstrated for a silicon nanoplasmonic device.
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M. P. Nielsen, M. P. Nielsen, A. Y. Elezzabi, A. Y. Elezzabi, } "Si-based nanoplasmonic resonant devices for all-optical integrated circuits", Proc. SPIE 8984, Ultrafast Phenomena and Nanophotonics XVIII, 89840I (7 March 2014); doi: 10.1117/12.2036775; https://doi.org/10.1117/12.2036775
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