Nb5N6 microbolometer array for a compact THz imaging system

X. C. Tu; Q. K. Mao; C. Wan; L. Xu; L. Kang; J. Chen; P. H. Wu

doi:10.1117/12.2038332

7 March 2014 Nb₅N₆ microbolometer array for a compact THz imaging system

X. C. Tu, Q. K. Mao, C. Wan, L. Xu, L. Kang, J. Chen, P. H. Wu

Proceedings Volume 8985, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications VII; 89850V (2014) https://doi.org/10.1117/12.2038332
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

A 1 × 16 Nb₅N₆ microbolometer array for a terahertz (THz) imaging system has been demonstrated. The system consists of an objective lens and an extended hemispherical silicon lens. A finite difference time domain (FDTD) method was used to analyze the imaging system in detail. The calculated field-of-view of the system is about 7° and the half-power beam width is about 160 μm. The microbolometer array chip is attached to the silicon lens for 0.3 THz detection. The preliminary results for the actual system shows that the mutual coupling among these antenna integrated elements can be ignored when the spacing is larger than 500 μm. The calculated results agree with the experimental data well, which means that the FDTD method can be used to evaluate and optimize such a compact THz imaging system. This linear imaging system should find direct application in active THz imaging.

Citation Download Citation

X. C. Tu, Q. K. Mao, C. Wan, L. Xu, L. Kang, J. Chen, and P. H. Wu "Nb₅N₆ microbolometer array for a compact THz imaging system", Proc. SPIE 8985, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications VII, 89850V (7 March 2014); https://doi.org/10.1117/12.2038332

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available