8 March 2014 Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors
Author Affiliations +
Proceedings Volume 8987, Oxide-based Materials and Devices V; 89870U (2014) https://doi.org/10.1117/12.2045551
Event: SPIE OPTO, 2014, San Francisco, California, United States
The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ~0.5, enabling high quality LiTi2O4 films to be prepared with a rocking curve full-width at half-maximum of ~0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (~3.0 × 103 Ω−1cm−1) and a superconducting transition temperature of ~13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Taro Hitosugi, Taro Hitosugi, D. Packwood, D. Packwood, S. Shiraki, S. Shiraki, "Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors", Proc. SPIE 8987, Oxide-based Materials and Devices V, 89870U (8 March 2014); doi: 10.1117/12.2045551; https://doi.org/10.1117/12.2045551


Back to Top