8 March 2014 Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint
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High-index-contrast optical devices form the backbone of densely integrated photonic circuits. While these devices are traditionally fabricated using lithography and etching, their performance is often limited by defects and sidewall roughness arising from fabrication imperfections. This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-performance, high-index-contrast photonic structures in composition-engineered chalcogenide glass (ChG) thin films. Thin film ChG have emerged as important materials for photonic applications due to their high refractive index, excellent transparency in the infrared and large Kerr non-linearity. Both thermally evaporated and solution processed As-Se thin films are successfully employed to imprint waveguides and micro-ring resonators with high replicability and low surface roughness (0.9 nm). The micro-ring resonators exhibit an ultra-high quality-factor of 4 × 105 near 1550 nm wavelength, which represents the highest value reported in ChG micro-ring resonators. Furthermore, sub-micron nanoimprint of ChG films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.
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Yi Zou, Yi Zou, Loise Moreel, Loise Moreel, Jie Zhou, Jie Zhou, Danning Zhang, Danning Zhang, Hongtao Lin, Hongtao Lin, Lan Li, Lan Li, Qingyang Du, Qingyang Du, Juejun Hu, Juejun Hu, Sylvain Danto, Sylvain Danto, Kathleen Richardson, Kathleen Richardson, J. David Musgraves, J. David Musgraves, Kevin D. Dobson, Kevin D. Dobson, Robert Birkmire, Robert Birkmire, "Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint", Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 898806 (8 March 2014); doi: 10.1117/12.2040454; https://doi.org/10.1117/12.2040454

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