Photonic integration in indium-phosphide membranes on silicon (IMOS)

Jos van der Tol; Josselin Pello; Shrivatsa Bhat; Yuqing Jiao; Dominik Heiss; Gunther Roelkens; Huub Ambrosius; Meint Smit

doi:10.1117/12.2045889

8 March 2014 Photonic integration in indium-phosphide membranes on silicon (IMOS)

Jos van der Tol, Josselin Pello, Shrivatsa Bhat, Yuqing Jiao, Dominik Heiss, Gunther Roelkens, Huub Ambrosius, Meint Smit

Author Affiliations +

Proceedings Volume 8988, Integrated Optics: Devices, Materials, and Technologies XVIII; 89880M (2014) https://doi.org/10.1117/12.2045889
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

A new photonic integration technique is presented, based on the use of an indium phosphide membrane on top of a silicon chip. This can provide electronic chips (CMOS) with an added optical layer (IMOS) for resolving the communication bottleneck. A major advantage of InP is the possibility to integrate passive and active components (SOAs, lasers) in a single membrane. In this paper we describe progress achieved in both the passive and active components. For the passive part of the circuit we succeeded to bring the propagation loss of our circuits close to the values obtained with silicon; we achieved propagation loss as low as 3.3 dB/cm through optimization of the lithography and the introduction of C₆₀ (fullerene) in an electro resist. Further we report the smallest polarisation converter reported for membrane waveguides ( <10 μm) with low-loss (< 1 dB from 1520- 1550 nm), > 95% polarisation conversion efficiency over the whole C-band and tolerant fabrication. We also demonstrate an InP-membrane wavelength demultiplexer with a loss of 2.8 dB, a crosstalk level of better than 18 dB and a uniformity over the 8 channels of better than 1.2 dB. For the integration of active components we are testing a twin guide integration scheme. We present our design based on optical and electrical simulations and the fabrication techniques.

Citation Download Citation

Jos van der Tol, Josselin Pello, Shrivatsa Bhat, Yuqing Jiao, Dominik Heiss, Gunther Roelkens, Huub Ambrosius, and Meint Smit "Photonic integration in indium-phosphide membranes on silicon (IMOS)", Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 89880M (8 March 2014); https://doi.org/10.1117/12.2045889

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available