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8 March 2014 Precision dicing of optical materials
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Ductile regime dicing has been used to machine a variety of optical materials to produce waveguides for lasers, multimode interference devices and non-linear devices. However, few papers discuss the properties of the machining, either qualitatively or quantitatively. In this work ductile regime dicing of germanium, Yttrium Aluminum Garnet (YAG), lithium niobate and silicon for photonic applications are reported. Machining parameters are discussed, surface micrographs shown, and surface roughnesses are calculated for each sidewall machined. The sidewall average surface roughnesses (Sa) were measured to be 2.1 nm for germanium, 3.5 nm for YAG, 7.9 nm for lithium niobate and 8.6 nm for silicon.
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L. G. Carpenter, C. Holmes, P. A. Cooper, J. C. Gates, and P. G. R. Smith "Precision dicing of optical materials", Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 898813 (8 March 2014);

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