Paper
8 March 2014 Monolithically integrated DWDM DFB laser array fabricated by a modified SAG technique
Can Zhang, Song Liang, Liangshun Han, Baojun Wang, Hongliang Zhu, Wei Wang
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Abstract
A modified SAG technique is reported for the fabrication of DWDM MWLAs. The 20-channel DFB laser arrays with 0.22nm and 0.44nm channel spacings are respectively obtained, which is promising for fabrication of low cost MWLAs.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Can Zhang, Song Liang, Liangshun Han, Baojun Wang, Hongliang Zhu, and Wei Wang "Monolithically integrated DWDM DFB laser array fabricated by a modified SAG technique", Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 89881I (8 March 2014); https://doi.org/10.1117/12.2034025
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KEYWORDS
Photomasks

Fabrication

Dense wavelength division multiplexing

Holography

Integrated optics

Plasma enhanced chemical vapor deposition

Semiconducting wafers

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