8 March 2014 Monolithically integrated DWDM DFB laser array fabricated by a modified SAG technique
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Proceedings Volume 8988, Integrated Optics: Devices, Materials, and Technologies XVIII; 89881I (2014); doi: 10.1117/12.2034025
Event: SPIE OPTO, 2014, San Francisco, California, United States
Abstract
A modified SAG technique is reported for the fabrication of DWDM MWLAs. The 20-channel DFB laser arrays with 0.22nm and 0.44nm channel spacings are respectively obtained, which is promising for fabrication of low cost MWLAs.
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Can Zhang, Song Liang, Liangshun Han, Baojun Wang, Hongliang Zhu, Wei Wang, "Monolithically integrated DWDM DFB laser array fabricated by a modified SAG technique", Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 89881I (8 March 2014); doi: 10.1117/12.2034025; https://doi.org/10.1117/12.2034025
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KEYWORDS
Photomasks

Fabrication

Dense wavelength division multiplexing

Holography

Integrated optics

Plasma enhanced chemical vapor deposition

Semiconducting wafers

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