8 March 2014 Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI
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Proceedings Volume 8990, Silicon Photonics IX; 89900W (2014) https://doi.org/10.1117/12.2039896
Event: SPIE OPTO, 2014, San Francisco, California, United States
Abstract
This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO2-covered reference MRRs. Excellent shielding for both cover materials has been obtained, however, water permeation into the SU8 causes a slow drift in sensor response. We believe that a user-friendly, low-cost and robust way for optical interfacing to MRR sensor chips is required for practical application in Point-Of-Care diagnostics, and that the cost and complexity of optical-electrical read-out systems must decrease. We have taken first steps to realize that vision, by building a prototype free-space optical coupling set-up, which enables non-photonic experts to characterize surface activation processes using MRRs. Moreover, we present our first steps towards on-chip read-out systems.
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S. M. C. Abdulla, B. M. De Boer, J. M. Pozo, J. H. van den Berg, A. Abutan, R. A. J. Hagen, D. M. R. LoCascio, P. J. Harmsma, "Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI", Proc. SPIE 8990, Silicon Photonics IX, 89900W (8 March 2014); doi: 10.1117/12.2039896; https://doi.org/10.1117/12.2039896
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