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8 March 2014 Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI
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Proceedings Volume 8990, Silicon Photonics IX; 89900W (2014)
Event: SPIE OPTO, 2014, San Francisco, California, United States
This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO2-covered reference MRRs. Excellent shielding for both cover materials has been obtained, however, water permeation into the SU8 causes a slow drift in sensor response. We believe that a user-friendly, low-cost and robust way for optical interfacing to MRR sensor chips is required for practical application in Point-Of-Care diagnostics, and that the cost and complexity of optical-electrical read-out systems must decrease. We have taken first steps to realize that vision, by building a prototype free-space optical coupling set-up, which enables non-photonic experts to characterize surface activation processes using MRRs. Moreover, we present our first steps towards on-chip read-out systems.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. M. C. Abdulla, B. M. De Boer, J. M. Pozo, J. H. van den Berg, A. Abutan, R. A. J. Hagen, D. M. R. LoCascio, and P. J. Harmsma "Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI", Proc. SPIE 8990, Silicon Photonics IX, 89900W (8 March 2014);

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