Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI

S. M. C. Abdulla; B. M. De Boer; J. M. Pozo; J. H. van den Berg; A. Abutan; R. A. J. Hagen; D. M. R. LoCascio; P. J. Harmsma

doi:10.1117/12.2039896

Translator Disclaimer

8 March 2014 Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI

S. M. C. Abdulla, B. M. De Boer, J. M. Pozo, J. H. van den Berg, A. Abutan, R. A. J. Hagen, D. M. R. LoCascio, P. J. Harmsma

Author Affiliations +

Proceedings Volume 8990, Silicon Photonics IX; 89900W (2014) https://doi.org/10.1117/12.2039896
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO₂-covered reference MRRs. Excellent shielding for both cover materials has been obtained, however, water permeation into the SU8 causes a slow drift in sensor response. We believe that a user-friendly, low-cost and robust way for optical interfacing to MRR sensor chips is required for practical application in Point-Of-Care diagnostics, and that the cost and complexity of optical-electrical read-out systems must decrease. We have taken first steps to realize that vision, by building a prototype free-space optical coupling set-up, which enables non-photonic experts to characterize surface activation processes using MRRs. Moreover, we present our first steps towards on-chip read-out systems.

Citation Download Citation

S. M. C. Abdulla, B. M. De Boer, J. M. Pozo, J. H. van den Berg, A. Abutan, R. A. J. Hagen, D. M. R. LoCascio, and P. J. Harmsma "Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI", Proc. SPIE 8990, Silicon Photonics IX, 89900W (8 March 2014); https://doi.org/10.1117/12.2039896

ACCESS THE FULL ARTICLE