Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

Yi Zou; Harish Subbaraman; Swapnajit Chakravarty; Xiaochuan Xu; Amir Hosseini; Wei-Cheng Lai; Ray T. Chen

doi:10.1117/12.2040412

8 March 2014 Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

Yi Zou, Harish Subbaraman, Swapnajit Chakravarty, Xiaochuan Xu, Amir Hosseini, Wei-Cheng Lai, Ray T. Chen

Proceedings Volume 8990, Silicon Photonics IX; 89900X (2014) https://doi.org/10.1117/12.2040412
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

A chip integrated infrared spectrometer for in situ sensing and spectroscopic identification of VOCs in water probing large absorption cross sections of VOCs in the mid-infrared is desired. Preliminary strip and slot waveguide devices fabricated in silicon-on-sapphire for operation at 3.4μm wavelength experimentally demonstrated propagation loss of 2.1dB/cm for strip waveguides and 11dB/cm for slot waveguide. VOC are extracted from water using PDMS for solid phase micro-extraction and enables absorbance measurements independent from the strong absorbance of water. Absorbance of xylene as a typical VOC is determined on chip from the difference in transmitted intensity in the presence and absence of xylene.

Citation Download Citation

Yi Zou, Harish Subbaraman, Swapnajit Chakravarty, Xiaochuan Xu, Amir Hosseini, Wei-Cheng Lai, and Ray T. Chen "Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water", Proc. SPIE 8990, Silicon Photonics IX, 89900X (8 March 2014); https://doi.org/10.1117/12.2040412

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