Adopting opto-piezoelectric materials, which utilized optical illumination pattern to effect the spatial force distribution induced by piezoelectric materials, to ultrasonic parking sensors and optofluidic chips represent a new research direction in industrial sub-system development. To accommodate performance requirements include wide bandwidth, ultrahigh precision, non-contact measurement mode, linear and angular measurement, etc. associated with the evaluation of the above-mentioned systems, a laser Doppler interferometer was implemented to facilitate the system development. The completely orthogonal alignment design configuration, system performance verified, signal processing algorithms developed as well as the experimental results obtained were all discussed in this paper. Emphasis is on the experimental data obtained from the interferometer and the design changes developed based on the metrology outcome. The system performance improvements induced by the experimental verification achieved by the interferometer were discussed in detail.