19 February 2014 Merged photonic crystal slot waveguide: confining slow modes in tiny volumes
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Abstract
In this proceeding we are describing the optimization of a silicon slot waveguide coated with titanium dioxide deposited by Atomic Layer Deposition. In addition we show the characterization of a photonic crystal cavity directly patterned on a slot waveguide.
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M. Roussey, A. Bera, P. Stenberg, S. Honkanen, M. Kuittinen, "Merged photonic crystal slot waveguide: confining slow modes in tiny volumes", Proc. SPIE 8994, Photonic and Phononic Properties of Engineered Nanostructures IV, 89940C (19 February 2014); doi: 10.1117/12.2036258; https://doi.org/10.1117/12.2036258
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