19 February 2014 Monolithic silicon waveguides in bulk silicon wafers
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We demonstrate two silicon photonic technologies for fabrication of monolithic photonic devices in standard silicon. Using these technologies, we demonstrate low-loss silicon waveguides (2.34 dB/cm), double-layer 3D waveguides, and waveguide Bragg reflectors in standard silicon for optical interconnects and sensing applications. These technologies simplify integration of electronics and photonics and are possible alternatives to SOI-based technology for implementation of silicon-photonic devices and systems for optical interconnects and sensing.
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Chia-Ming Chang, Chia-Ming Chang, Olav Solgaard, Olav Solgaard, "Monolithic silicon waveguides in bulk silicon wafers", Proc. SPIE 9010, Next-Generation Optical Networks for Data Centers and Short-Reach Links, 90100G (19 February 2014); doi: 10.1117/12.2044159; https://doi.org/10.1117/12.2044159

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