20 December 2013 Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor
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Proceedings Volume 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 90440B (2013) https://doi.org/10.1117/12.2036262
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
We fabricated MEMS-based optical fiber pressure sensor with anodic bonding. The vacuum-sealed microcavity with a thin silicon diaphragm is used as sensing element and its deformation characteristics determine the pressure measurement performance. Considering residual gas inside Fabry-Perot cavity and the thermal properties of material, we established a sensor’s temperature response mathematical model based on ideal gas equation and elastic theory. Temperature experiment of this sensor was carried out under vacuum. This work will provide a guide of temperature compensation process for achieving high precision pressure measurement.
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Jinde Yin, Tiegen Liu, Junfeng Jiang, Kun Liu, Shuang Wang, Bofu Zhao, Lei Xue, Yunqiao Mei, Yi Pu, Jishou Yin, Zunqi Qin, Shengliang Zou, "Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor", Proc. SPIE 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 90440B (20 December 2013); doi: 10.1117/12.2036262; https://doi.org/10.1117/12.2036262
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