20 December 2013 Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor
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Proceedings Volume 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 90440B (2013) https://doi.org/10.1117/12.2036262
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
We fabricated MEMS-based optical fiber pressure sensor with anodic bonding. The vacuum-sealed microcavity with a thin silicon diaphragm is used as sensing element and its deformation characteristics determine the pressure measurement performance. Considering residual gas inside Fabry-Perot cavity and the thermal properties of material, we established a sensor’s temperature response mathematical model based on ideal gas equation and elastic theory. Temperature experiment of this sensor was carried out under vacuum. This work will provide a guide of temperature compensation process for achieving high precision pressure measurement.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinde Yin, Jinde Yin, Tiegen Liu, Tiegen Liu, Junfeng Jiang, Junfeng Jiang, Kun Liu, Kun Liu, Shuang Wang, Shuang Wang, Bofu Zhao, Bofu Zhao, Lei Xue, Lei Xue, Yunqiao Mei, Yunqiao Mei, Yi Pu, Yi Pu, Jishou Yin, Jishou Yin, Zunqi Qin, Zunqi Qin, Shengliang Zou, Shengliang Zou, } "Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor", Proc. SPIE 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 90440B (20 December 2013); doi: 10.1117/12.2036262; https://doi.org/10.1117/12.2036262
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