19 December 2013 Optimized design and error analysis of optical system for heterodyne grating interferometry
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Abstract
Based on the detailed derivation of the displacement measurement principle with Jones matrix method, the optical system of the heterodyne grating interferometry that we previously proposed was modified. A reflection phase grating with smaller grating pitch was designed with rigorous coupled-wave analysis (RCWA) to improve the measurement performance. The first order diffraction efficiency of 47.35% and 56.24% were obtained for TE and TM polarization, respectively. Therefore the TM polarization was chose to enhance the signal-to-noise ratio (SNR) of the beat signal. Meanwhile, the errors of the optical system resulting from grating non-uniformity, frequency mixing, polarization mixing and polarization-frequency mixing were discussed as well. It was shown that the frequency mixing was the main source of the errors, and the modified heterodyne grating interferometry had the potential to realize nanometer resolution for displacement measurement.
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Cunbao Lin, Cunbao Lin, Shuhua Yan, Shuhua Yan, Chunhua Wei, Chunhua Wei, Guochao Wang, Guochao Wang, Pengfei Zou, Pengfei Zou, } "Optimized design and error analysis of optical system for heterodyne grating interferometry", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 90460C (19 December 2013); doi: 10.1117/12.2037576; https://doi.org/10.1117/12.2037576
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