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19 December 2013 The studying of solar cell process by using optoelectronic measurement system
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For the optical anti-reflection coating (ARC) and passivation properties, the relationship between parameters of PECVD and solar cell photoelectricity properties is investigated in this work. Solar cell’s photoelectricity properties are studied by using various optoelectronic measurement systems. It is found that minority carrier recombination can be reduced by changing the parameters of PECVD, specially tuning pressure parameter, and the hydrogen content is different as the gas total flow changing if the temperature and pressure no changes. And also the hydrogen content can be calculated by absorption spectrum being tested with optoelectronic measurement system.
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Hongfang Wang, Fang Lang, Jinchao Shi, Gaofei Li, Zhiyan Hu, and Jingfeng Xiong "The studying of solar cell process by using optoelectronic measurement system", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 90461B (19 December 2013);

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