21 December 2013 Influence of growth temperature on the properties of Al-doped ZnO thin film fabricated by pulsed laser deposition
Author Affiliations +
Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 904706 (2013) https://doi.org/10.1117/12.2035180
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
Al-doped ZnO thin film (AZO) is regarded as a potential candidate to replace the expensive ITO thin film and is the central issue in current research in the field of transparent conductive film because of its properties of high conductivity, low level of pollution, high transmittanceand and low fabrication cost. In this paper, c-axis preferred growth AZO films were fabricated on sapphire (0001) substrate by the pulsed laser deposition at different substrate temperatures (Ts). The scanning electron microscope (SEM), X-ray diffraction (XRD) and the four-point probe (FPP) were used to measure the thin film microstructure and electrical characteristics. SEM results show that the surfaces of all AZO films are very flat and have no droplets on them, expect the film grown at room temperature. The grain sizes of AZO gradually decrease with increse of Ts. X-ray diffraction spectra show that the quality of the crystallization of thin films gradually is improved with increase of Ts. The results measured by FPP show that with increase of temperature, sheet resistance first decreases then increases.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yang Zhou, Yang Zhou, Hongfang Zheng, Hongfang Zheng, Lei Zhang, Lei Zhang, Yingcai Peng, Yingcai Peng, Qingxun Zhao, Qingxun Zhao, Baoting Liu, Baoting Liu, } "Influence of growth temperature on the properties of Al-doped ZnO thin film fabricated by pulsed laser deposition", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 904706 (21 December 2013); doi: 10.1117/12.2035180; https://doi.org/10.1117/12.2035180
PROCEEDINGS
6 PAGES


SHARE
Back to Top