21 December 2013 Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist
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Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470C (2013) https://doi.org/10.1117/12.2036521
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
The Offner-like spectrometer, one most widely used hyperspectral imaging spectrometers, offers some advantages over other spectrometers used in pushbroom imaging spectrometry: low chromatic aberrations, a compact size with low optical distortion, and large numerical aperture. The standard Offner spectrometer is made of three spherical concentric elements-- two concave mirrors and one convex grating. Convex grating is the core part of Offner type hyper-spectral imager. Considering the difficulties in fabrication of small angles convex gratings by traditional ways, we propose a new method. The ion-beam-etching holographic grating is adopted to obtain the convex blazed gratings with blazed angle of 4°--5°, whose angle can be further reduced by dipping or spinning coating with hardenable liquids. A highly reproducible blaze angle reduction to as high as a factor of 3 is achieved by controlling the spinning speed and viscosity of solution. The precise control of the blaze angles and groove profiles will be further studied focusing on the designing of rotate dip equipment and optimization of pulling speed and viscosity of solution.
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Yu Cheng, Yu Cheng, Quan Liu, Quan Liu, Jianhong Wu, Jianhong Wu, } "Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470C (21 December 2013); doi: 10.1117/12.2036521; https://doi.org/10.1117/12.2036521
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