21 December 2013 High performance and compact polarization beam splitter based on silicon-on-insulator subwavelength grating coupler
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Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470D (2013) https://doi.org/10.1117/12.2041765
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
A high coupling efficiency silicon grating which serves both as a high extinction ratio polarization beam splitter and a vertical coupler for silicon photonic circuits at the wavelength of 1550nm is presented. The design is based on the Bragg diffraction condition and the phase matching equation by using the rigorous coupled wave analysis (RCWA). For TE-polarized light, the computing coupling efficiency is as high as 69%, and the extinction ratio can reach - 20dB. The efficiency of TM-polarized wave is better than 53% and the extinction ratio is approximately -11dB. The device has compact structure, high TE to TM extinction ratio, low excess loss and wide operation bandwidth. Moreover, the simple fabrication method involves only single etch step and good compatibility with complementary metal oxide semiconductor (CMOS) technology.
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Junbo Yang, Zhengzheng Shao, Kuo Zhou, Suzhi Xu, Jia Xu, "High performance and compact polarization beam splitter based on silicon-on-insulator subwavelength grating coupler", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470D (21 December 2013); doi: 10.1117/12.2041765; https://doi.org/10.1117/12.2041765
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